Swing arm optical CMM: self calibration with dual probe shear test
- Su, P.; Wang, Y.; Oh, C. J.; Parks, R. E.; Burge, J. H.
Swing arm optical CMM (SOC), a profilometer with distance measuring interferometric probe for in situ measurement of the topography of aspheric has been used for measuring highly aspheric mirrors with a performance rivaling full aperture interferometric tests. Recently, we implemented a dual probe self calibration mode for the SOC. Data from the dual probes can be used to calibrate the swing-arm air bearing errors since both probes see the same bearing errors while measuring different portions of the test surface. Bearing errors are reconstructed from the shear signal with a modal estimation.
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