Tagged with: MicroFinish Topographer
Super-Smooth Optical Fabrication Controlling High Spatial Frequency Surface Irregularity (ABSTRACT)
ABSTRACT: A paper by Del Hoyo, et. al., showing how the MicroFinish Topographer (MFT) was used for in process control assessment of the removal of high spatial frequency polishing errors during polishing as a function of type of polishing compound and polishing pad. The MFT was particularly useful for determining when a surface was fully polished out, that is, had no defects left from previous steps in the lapping and polishing process.