Use of the Surface PSD to Investigate Near Specular Scatter from Smooth Surfaces (ABSTRACT)
ABSTRACT: A paper by Talabaly, et. al., showing that a low magnification objective on the MicroFinish Topographer (MFT) can measure surface roughness in a spatial frequency domain that is so close to specular that it is not possible to make a similar measurement with a scatterometer. This makes it possible to predict a valid near specular BRDF that is functionally not measureable, particularly if the substrate material scatters.
, Mid-spatial Frequency Roughness
, Near specular scatter
, Surface power spectrum
, Surface Topography Measurement